✦ LIBER ✦
Electron energy distributions and anomalous skin depth effects in high-plasma-density inductively coupled discharges
✍ Scribed by Vasenkov, Alex V.; Kushner, Mark J.
- Book ID
- 120309837
- Publisher
- The American Physical Society
- Year
- 2002
- Tongue
- English
- Weight
- 380 KB
- Volume
- 66
- Category
- Article
- ISSN
- 1063-651X
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