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Longitudinal and transversal moments of the distribution of boron ions implanted in silicon in the MeV energy range

✍ Scribed by P. Thevenin; J.J. Grob; R. Stuck; P. Siffert


Book ID
113282724
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
424 KB
Volume
62
Category
Article
ISSN
0168-583X

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