Local control of SiC polytypes

✍ Scribed by Pezoldt, J. ;Morales, F. M. ;Kalnin, A. A.

• Book ID: 105364170
• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 320 KB
• Volume: 204
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200674123

✦ Synopsis

Abstract

In the case of SiC different methods for the formation of laterally and vertically stacked desired polytype inclusions are presented. The methods are based on a combination of ion implantation and annealing combined with epitaxial growth by sublimation technique. Nanoheteropolytype structures were formed using CVD. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)