## Abstract In the case of SiC different methods for the formation of laterally and vertically stacked desired polytype inclusions are presented. The methods are based on a combination of ion implantation and annealing combined with epitaxial growth by sublimation technique. Nanoheteropolytype stru
β¦ LIBER β¦
Identification and control of SiC polytypes in PVT method
β Scribed by Shenghuang Lin; Zhiming Chen; Bo Liu; Lianbi Li; Xianfeng Feng
- Book ID
- 106398418
- Publisher
- Springer US
- Year
- 2009
- Tongue
- English
- Weight
- 298 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0957-4522
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