Large SiC crystals can be grown by a sublimation process. For electronic application the control of the growth of a definite polytype is important. We have shown that sublimation growth on the Si[0001] side, under given conditions, always crystallizes the 6H polytype regardless of the polytype of th
โฆ LIBER โฆ
Control of polytype formation by surface energy effects during the growth of SiC monocrystals by the sublimation method
โ Scribed by R.A. Stein; P. Lanig
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 323 KB
- Volume
- 131
- Category
- Article
- ISSN
- 0022-0248
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