Local control of SiC polytypes
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Pezoldt, J. ;Morales, F. M. ;Kalnin, A. A.
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Article
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2007
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John Wiley and Sons
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English
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## Abstract In the case of SiC different methods for the formation of laterally and vertically stacked desired polytype inclusions are presented. The methods are based on a combination of ion implantation and annealing combined with epitaxial growth by sublimation technique. Nanoheteropolytype stru