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Limited reaction processing: Growth of Si1−xGex/Si for heterojunction bipolar transistor applications

✍ Scribed by J.L. Hoyt; C.A. King; D.B. Noble; C.M. Gronet; J.F. Gibbons; M.P. Scott; S.S. Laderman; S.J. Rosner; K. Nauka; J. Turner; T.I. Kamins

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