✦ LIBER ✦

Light scattering properties of x-ray lithography mask substrates

✍ Scribed by J.R. Maldonado; Y. Vladimirsky; O. Vladimirsky; I. Babich; R. Fuentes; D. Guarnieri; S.W. Whitehair; J. Cuomo

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Distortion of masks for x-ray lithograph

✍ R.E. Acosta; J.R. Maldonado; R. Fair; R. Viswanathan; A.D. Wilson 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 432 KB

Electrical resistivity and radiation dam

✍ S.S. Dana; J. Batey; J.R. Maldonado; O. Vladimirsky; R. Fair; R. Viswanathan 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 493 KB

Thermoelastic deformations of masks for

✍ G. Feiertag; M. Schmidt; A. Schmidt 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 784 KB

Infrared-measurement of X-ray mask heati

✍ J. Trube; H.-L. Huber; S. Mourikis; S. Bernstorff; E.E. Koch 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 438 KB

Procedure and results of mask fabricatio

✍ Jürgen Grimm; Jutta Trube; Hans-Ludwig Huber 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 359 KB

Elastic deformation of x-ray lithography

✍ A.C. Chen; J.R. Maldonado 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 374 KB