✦ LIBER ✦

Elastic deformation of x-ray lithography masks during anodic bonding

✍ Scribed by A.C. Chen; J.R. Maldonado

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thermoelastic deformations of masks for

✍ G. Feiertag; M. Schmidt; A. Schmidt 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 784 KB

Infrared-measurement of X-ray mask heati

✍ J. Trube; H.-L. Huber; S. Mourikis; S. Bernstorff; E.E. Koch 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 438 KB