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Light-enhanced reactivation of passivated boron in hydrogen treated silicon

✍ Scribed by T. Zundel; J. Weber; L. Tilly

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 263 KB
Volume: 170
Category: Article
ISSN: 0921-4526
DOI: 10.1016/0921-4526(91)90147-7

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