Passivation and reactivation of carriers in B- and P-doped Si treated with atomic hydrogen

✍ Scribed by N. Fukata; S. Sato; S. Fukuda; K. Ishioka; M. Kitajima; S. Hishita; K. Murakami

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 265 KB
• Volume: 401-402
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/j.physb.2007.08.140