Easy-to-use surface passivation techniqu
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Jan Schmidt; Armin G. Aberle
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Article
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1998
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John Wiley and Sons
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English
⚖ 155 KB
A novel, easily applicable surface passivation technique is presented, which, in combination with contactless photocoductance decay (PCD) measurements, allows a quick estimation of the bulk carrier lifetime of crystalline silicon wafers. The proposed passivation technique requires neither a chemical