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Leakage current modeling of test structures for characterization of dark current in CMOS image sensors

โœ Scribed by Loukianova, N.V.; Folkerts, H.O.; Maas, J.P.V.; Verbugt, D.W.E.; Mierop, A.J.; Hoekstra, W.; Roks, E.; Theuwissen, A.J.P.


Book ID
114616946
Publisher
IEEE
Year
2003
Tongue
English
Weight
628 KB
Volume
50
Category
Article
ISSN
0018-9383

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We, authors report a study on the junction leakage current of CMOS image sensor adopting p-epi/n-sub structure. High leakage current (more than 100 A) through the junction between p-epi and n-sub (at reverse bias) were observed with non-uniformed or jagged test patterns (dislodged slivers) of the ch