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Layer uniformity in a multiwafer MOVPE reactor for III–V compounds

✍ Scribed by P.M. Frijlink; J.L. Nicolas; P. Suchet

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Growth of extremely uniform III–V compou

✍ D. Schmitz; G. Strauch; H. Jürgensen; M. Heyen 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 230 KB

In-situ formation of As-H functions by β

✍ G. Zimmermann; H. Protzmann; W. Stolz; E.O. Göbel; P. Gimmnich; A. Greiling; J. 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 549 KB