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Growth of extremely uniform III–V compound semiconductor layers by LP-MOVPE by application of the gas foil technique for substrate rotation

✍ Scribed by D. Schmitz; G. Strauch; H. Jürgensen; M. Heyen


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
230 KB
Volume
107
Category
Article
ISSN
0022-0248

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