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In-situ formation of As-H functions by β-elimination of specific metalorganic arsenic compounds for the MOVPE of III/V semiconductors

✍ Scribed by G. Zimmermann; H. Protzmann; W. Stolz; E.O. Göbel; P. Gimmnich; A. Greiling; J. Lorberth; C. Thalmann; K. Rademann


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
549 KB
Volume
124
Category
Article
ISSN
0022-0248

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