Lateral SiGe heterojunction bipolar transistor by confined selective epitaxial growth: simulation and material growth

✍ Scribed by P. Pengpad; K. Osman; N.S. Lloyd; J.M. Bonar; P. Ashburn; H.A. Kemhadjian; J.S. Hamel; D.M. Bagnall

• Book ID: 113797667
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 539 KB
• Volume: 73-74
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.03.026