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Lateral growth rates in laser CVD of microstructures

✍ Scribed by F. Petzoldt; K. Piglmayer; W. Kräuter; D. Bäuerle

Book ID: 104842127
Publisher: Springer
Year: 1984
Tongue: English
Weight: 532 KB
Volume: 35
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00616969

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