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Analysis of GaAs Growth Rate Anisotropy in Some CVD Systems

✍ Scribed by Dr. L. G. Lavrentieva

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Deposition of high quality GaAs films at

✍ K. Grüter; M. Deschler; H. Jürgensen; R. Beccard; P. Balk 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 439 KB