Deposition of high quality GaAs films at fast rates in the LP-CVD system

✍ Scribed by K. Grüter; M. Deschler; H. Jürgensen; R. Beccard; P. Balk

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 439 KB
• Volume: 94
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(89)90082-1