Simulation of growth in pyrolytic laser-CVD of microstructures—I. One-dimensional approach
✍ Scribed by N. Arnold; R. Kullmer; D. Bäuerle
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 704 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0167-9317
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