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Lasing in GaN microdisks pivoted on Si

✍ Scribed by Choi, H. W.; Hui, K. N.; Lai, P. T.; Chen, P.; Zhang, X. H.; Tripathy, S.; Teng, J. H.; Chua, S. J.

Book ID
120427503
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
615 KB
Volume
89
Category
Article
ISSN
0003-6951

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GaN MQW microdisks pivoted on Si substra
GaN MQW microdisks pivoted on Si substrate
✍ Choi, H. W. ;Yang, B. L. ;Lai, P. T. ;Chen, P. ;Zhang, X. H. ;Teng, J. H. ;Chua, πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 262 KB

## Abstract The fabrication and characterization of GaN MQW microdisks pivoted on Si is reported in this paper. The GaN microdisks were patterned by photolithography and dry‐etched. This is followed by an isotropic wet‐etch process to remove the Si underneath the GaN microdisks, exposing the bottom