𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Lasers in chemical vapour deposition


Publisher
Elsevier Science
Year
1973
Tongue
English
Weight
182 KB
Volume
12
Category
Article
ISSN
0026-2714

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Silica deposition by excimer-laser-induc
✍ Betty León; Armin Klumpp; Pío González; Eduardo G. Parada; Dolores Fernández; Ju 📂 Article 📅 1996 🏛 John Wiley and Sons 🌐 English ⚖ 781 KB

Silicon oxide films have been deposited on silicon wafers at low temperature by irradiation of the substrates with an ArF (A = 193 nm) excimer laser beam in a SiH, and N20 atmosphere. A systematic study of the growth rate and properties of the films as a function of the processing parameters (gas co

Laser type of spectral narrowing in elec
✍ L Heikkilä; T Kuusela; H.-P Hedman 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 730 KB

Si/SiO 2 superlattices were fabricated by low-pressure chemical vapour deposition. Superlattices of 75-150 nm layer pair thicknesses and having 1-8 layer pairs were investigated in order to evaluate their surface structure and electroluminescent properties. Atomic force microscopy (AFM) studies were