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Laser thermal processing using an optical coating for ultra shallow junction formation

✍ Scribed by M. Hernandez; J. Venturini; D. Berard; G. Kerrien; T. Sarnet; D. Débarre; J. Boulmer; C. Laviron; D. Camel; J.-L. Santailler; H. Akhouayri

Book ID: 103843150
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 276 KB
Volume: 114-115
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2004.07.092

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