Laser thermal processing for ultra shallow junction formation: numerical simulation and comparison with experiments

✍ Scribed by M. Hernandez; J. Venturini; D. Zahorski; J. Boulmer; D. Débarre; G. Kerrien; T. Sarnet; C. Laviron; M.N. Semeria; D. Camel; J.L. Santailler

• Book ID: 108417959
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 350 KB
• Volume: 208-209
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(02)01395-8