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Laser Processing of Polysilicon Thin-Film Transistors: Grain Growth and Device Fabrication

✍ Scribed by Boyce, J. B. ;Mei, P. ;Fulks, R. T. ;Ho, J.

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 373 KB
Volume: 166
Category: Article
ISSN: 0031-8965
DOI: 10.1002/(sici)1521-396x(199804)166:2<729::aid-pssa729>3.0.co;2-1

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