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Laser polymerization-based novel lift-off technique

โœ Scribed by B. Bhuian; R.J. Winfield; G.M. Crean

Book ID
103819574
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
507 KB
Volume
255
Category
Article
ISSN
0169-4332

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โœ Li Zilan; Hu Xiaodong; Chen Ke; Nie Ruijuan; Luo Xuhui; Zhang Xiaoping; Yu Tongj ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 246 KB

Laser lift-off (LLO) technology is successfully used to prepare GaN-based TEM cross-sectional specimens. Detailed procedures of the method to prepare the specimens are demonstrated. Large thin areas suitable for TEM analysis were obtained. TEM images of the resulting GaN interface are studied, and t