✦ LIBER ✦

Laser plasma shockwave cleaning of SiO2 particles on gold film

✍ Scribed by Yayun Ye; Xiaodong Yuan; Xia Xiang; Wei Dai; Meng Chen; Xinxiang Miao; Haibing Lv; Haijun Wang; Wanguo Zheng

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 944 KB
Volume: 49
Category: Article
ISSN: 0143-8166
DOI: 10.1016/j.optlaseng.2010.12.006

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Influence of storage time on laser clean

Influence of storage time on laser cleaning of SiO2on Si

✍ G. Schrems; M.P. Delamare; N. Arnold; P. Leiderer; D. Bäuerle 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 525 KB

Topographic study of thin gold films gro

Topographic study of thin gold films grown on SiO2

✍ L. Stockman; H. Vloeberghs; I. Heyvaert; C. Van Haesendonck; Y. Bruynseraede 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 731 KB

Nucleation of small metal particles on u

Nucleation of small metal particles on ultrathin SiO2 films on Si

✍ L. Kasprzak; R. Laibowitz; S. Herd; M. Ohring 📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 600 KB

On the structure of thin plasma-treated

On the structure of thin plasma-treated thermal SiO2 films

✍ Dr. L. I. Popova; Dr. E. D. Atanassova; Dr. S. K. Peneva; Dr. E. A. Tcukeva 📂 Article 📅 1988 🏛 John Wiley and Sons 🌐 English ⚖ 656 KB

Atomic Force Microscopy Study of the Kin

Atomic Force Microscopy Study of the Kinetic Roughening in Nanostructured Gold Films on SiO2

✍ F. Ruffino; M. G. Grimaldi; F. Giannazzo; F. Roccaforte; V. Raineri 📂 Article 📅 2009 🏛 Springer-Verlag 🌐 English ⚖ 366 KB

The properties of Ru films deposited by

The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2

✍ Park, Taeyong ;Choi, Dongjin ;Choi, Hagyoung ;Jeon, Hyeongtag 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 405 KB

## Abstract By using remote plasma atomic layer deposition (ALD), ruthenium thin films were deposited on SiO~2~ using bis(ethylcyclopentadienyl)ruthenium [Ru(EtCp)~2~] as a Ru precursor and an ammonia plasma as a reactant. Different plasma treatments were applied, and the best results were obtained