Conducting atomic force microscopy studi
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Atsushi Ando; Ryu Hasunuma; Tatsuro Maeda; Kunihiro Sakamoto; Kazushi Miki; Yasu
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Article
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2000
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Elsevier Science
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English
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## Ε½ . Ε½ . We have demonstrated the characterizations of the local electrical properties of ultrathin 1-4 nm SiO rSi 001 2 Ε½ y5 . structures using a conducting atomic force microscopy with a nanometer-scale resolution in a vacuum 1 = 10 Pa . The measurement in a vacuum enables to reduce the influe