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Laser interferometer for measuring strains of a rotating platform

โœ Scribed by G. I. Leibengardt; E. V. Sukorskaya; V. L. Shur

Publisher
Springer US
Year
1996
Tongue
English
Weight
278 KB
Volume
39
Category
Article
ISSN
0543-1972

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โœ Shyh-Tsong Lin ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 121 KB

This paper proposes a laser interferometer for determining the straightness of a moving stage. The optical setup is described and the theory is derived. The results show that this interferometer not only overcomes the disadvantages of the conventional interferometers but also provides a higher sensi