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A laser interferometer for measuring straightness

✍ Scribed by Shyh-Tsong Lin

Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
121 KB
Volume
33
Category
Article
ISSN
0030-3992

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✦ Synopsis

This paper proposes a laser interferometer for determining the straightness of a moving stage. The optical setup is described and the theory is derived. The results show that this interferometer not only overcomes the disadvantages of the conventional interferometers but also provides a higher sensitivity. Two experiments were carried out in this research. The ΓΏrst experiment veriΓΏes the validity of the theoretical derivation. The second experiment demonstrates that this interferometer could be adopted for straightness measurements.

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Note. The influence of lens abberations are not observed, because the interference pattern is small (approximately 3mm diameter) Influence on the spatial frequency caused by using a sphere as the Fourier transform plane, cannot be observed for the same reason. ## CONCLU~ON The method described i