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A heterodyne laser interferometer for dilatometer measurements

โœ Scribed by V. P. Kulesh; L. M. Moskalik; A. A. Sharov


Publisher
Springer US
Year
2009
Tongue
English
Weight
183 KB
Volume
52
Category
Article
ISSN
0543-1972

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This paper proposes a laser interferometer for determining the straightness of a moving stage. The optical setup is described and the theory is derived. The results show that this interferometer not only overcomes the disadvantages of the conventional interferometers but also provides a higher sensi