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Laser-induced fluorescence of OH and SiO molecules during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures

✍ Scribed by Peter van de Weijer; Bauke H. Zwerver

Book ID: 107733340
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 562 KB
Volume: 163
Category: Article
ISSN: 0009-2614
DOI: 10.1016/0009-2614(89)80009-0

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