Laser CVD of a-Si:H from SiH4 and Si2H6: relations between chemistry, growth rate and film properties

✍ Scribed by K. Hesch; P. Hess; H. Oetzmann; C. Schmidt

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 651 KB
• Volume: 46
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(90)90149-t