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Laser-assisted CVD of amorphous materials

✍ Scribed by Iva Gianinoni; Mirella Musci


Book ID
118333488
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
460 KB
Volume
77-78
Category
Article
ISSN
0022-3093

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## Abstract Nanocrystals of cubic silicon carbide (SiC) are formed using laser‐assisted gas‐phase synthesis. A CO~2~ laser beam is mechanically chopped to obtain pulsed infrared (IR) excitation. Silane (SiH~4~) and acetylene (C~2~H~2~) have been used as precursors. The SiC particles formed adopt th