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Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII)

✍ Scribed by Vanessa Vervisch; Yannick Larmande; Philippe Delaporte; Thierry Sarnet; Marc Sentis; Hasnaa Etienne; Frank Torregrosa; Fuccio Cristiano; Pier Francesco Fazzini

Book ID: 108063809
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 593 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.11.010

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