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Large microwave plasma reactor based on surface waves

✍ Scribed by Boisse-Laporte, C.; Bénissad, N.; Béchu, S.


Book ID
121455992
Publisher
EDP Sciences
Year
1998
Weight
376 KB
Volume
08
Category
Article
ISSN
1155-4339

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The structure of waves in a microwave-excited plasma reactor using the multi-slotted planar (MSP) antenna is investigated by experimental measurements and numerical analyses. As a result, it is shown that the radial mode number is fixed and equals to 5 in a wide range of the plasma density, and mode