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Large-diameter microwave plasma source excited by azimuthally symmetric surface waves

✍ Scribed by M. Tuda; K. Ono; H. Ootera; M. Tsuchihashi; M. Hanazaki; T. Komemura


Book ID
125538589
Publisher
AVS (American Vacuum Society)
Year
2000
Tongue
English
Weight
506 KB
Volume
18
Category
Article
ISSN
0734-2101

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