✦ LIBER ✦
Wave analysis in microwave-excited plasma reactor using MSP antenna
✍ Scribed by A. Tsuji; Y. Yasaka; H. Takeno
- Book ID
- 104094313
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 579 KB
- Volume
- 202
- Category
- Article
- ISSN
- 0257-8972
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✦ Synopsis
The structure of waves in a microwave-excited plasma reactor using the multi-slotted planar (MSP) antenna is investigated by experimental measurements and numerical analyses. As a result, it is shown that the radial mode number is fixed and equals to 5 in a wide range of the plasma density, and mode jumps of surface wave hardly appear. Mode jumps of surface wave cause the non-uniformity of the plasma density. Therefore, it is considered that the characteristic in the device is an advantage for controlling plasma parameters.