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Large-Area Three-Dimensional Structuring by Electrochemical Etching and Lithography

✍ Scribed by S. Matthias; F. Müller; C. Jamois; R. B. Wehrspohn; U. Gösele

Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 280 KB
Volume: 16
Category: Article
ISSN: 0935-9648
DOI: 10.1002/adma.200400436

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