✦ LIBER ✦

Large-area multiarc ion beam source “MAIS”

✍ Scribed by Engelko, V.; Giese, H.; Schalk, S.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Large area ion and plasma beam sources

✍ J. Waldorf 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 826 KB

Intense fast atom-beam production with a

✍ M. Fumelli 📂 Article 📅 1974 🏛 Elsevier Science ⚖ 446 KB

RF ion source for low energy ion implant

✍ Masayasu Tanjyo; Shigeki Sakai; Masato Takahashi 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 329 KB

Uniform large area beam scanning with a

✍ Michael Kanter; Andrew Wittkower 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 246 KB

A 915 MHz/2.45 GHz ECR plasma source for

✍ Asmussen, J.; Hopwood, J.; Sze, F. C. 📂 Article 📅 1990 🏛 American Institute of Physics 🌐 English ⚖ 655 KB

Development and use of a large area ultr

✍ G. Proudfoot; C.M.O. Mahony; R. Perrin 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 358 KB