A 915 MHz/2.45 GHz ECR plasma source for large area ion beam and plasma processing

✍ Scribed by Asmussen, J.; Hopwood, J.; Sze, F. C.

• Book ID: 120528884
• Publisher: American Institute of Physics
• Year: 1990
• Tongue: English
• Weight: 655 KB
• Volume: 61
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.1141310