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Large area etching for porous semiconductors

✍ Scribed by J. Carstensen; M. Christophersen; S. Lölkes; E. Ossei-Wusu; J. Bahr; S. Langa; G. Popkirov; H. Föll

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 317 KB
Volume: 2
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200461159

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