Langmuir probe studies and ion energies in gas discharges used for cleaning vacuum chambers

✍ Scribed by AG Mathewson; A Grillot; S Hazeltine; K Lee Li; A Foakes; H Störi

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 584 KB
• Volume: 31
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(81)80040-1

✦ Synopsis

From 4 x 10P3 torr to 5x 10e2 torr the electron temperature in Ar. Ar/O, and H, gas discharges decreases with evidence of more than one electron population with different temperatures. Electron and ion densities of -lo'= mW3 were measured. The plasma potentials lay within a few volts of the anode potential and remained almost constant to the dark space near the chamber wall. All ions exhibited peaks in their energy distribution at or close to that corresponding to anode potential. Due to collisions with gas molecules the 0' distribution in the argon+ 10% oxygen discharge exhibited a peak corresponding to exactly half the anode potential. In the hydrogen discharge, the product H,O' was observed resulting from interaction of H" or H' with the oxide of the wall.