5319. Langmuir probe studies and ion energies in gas discharges used for cleaning vacuum chambers: A G Mathewson et al, Vacuum, 31 (8–9), 1981, 337–344

Langmuir probe studies and ion energies

Langmuir probe studies and ion energies in gas discharges used for cleaning vacuum chambers

✍ AG Mathewson; A Grillot; S Hazeltine; K Lee Li; A Foakes; H Störi 📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 584 KB

From 4 x 10P3 torr to 5x 10e2 torr the electron temperature in Ar. Ar/O, and H, gas discharges decreases with evidence of more than one electron population with different temperatures. Electron and ion densities of -lo'= mW3 were measured. The plasma potentials lay within a few volts of the anode po