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Kinetics of the reactions of intrinsic and phosphorus doped polycrystalline silicon with molecular chlorine

✍ Scribed by Zane H. Walker; Elmer A. Ogryzlo

Book ID: 103667522
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 548 KB
Volume: 153
Category: Article
ISSN: 0301-0104
DOI: 10.1016/0301-0104(91)80061-l

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