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Kinetics of solid phase regrowth of self-ion-implanted amorphous SiC during low temperature furnace annealing

✍ Scribed by O. Eryu; K. Abe; K. Nakashima; H. Harima

Book ID: 114167234
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 165 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00904-2

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