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Kinetics of formation of sulfur dimers in pure SF6and SF6-O2discharges

โœ Scribed by N. Sadeghi; H. Debontride; G. Turban; M. C. Peignon

Publisher
Springer
Year
1990
Tongue
English
Weight
715 KB
Volume
10
Category
Article
ISSN
0272-4324

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