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Kinetic study of the solid phase reaction of ammonium nitrate and copper oxide by the use of fast x-ray diffraction

✍ Scribed by N. Eisenreich; W. Engel

Publisher
Springer Netherlands
Year
1989
Tongue
English
Weight
282 KB
Volume
35
Category
Article
ISSN
0022-5215

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A1N layers were elaborated on SiC substrates using the method of low-pressure chemical vapour deposition ( LPCVD ). The oxMation of these layers was studied in an X-ray diffkaction chamber at temperalures between 900 and 1400~C with an oxygen flow (20 SCCM ) at a pressure of 85 x 103 Pa. The oxidat