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Kinetic Modeling of the Hydrochlorination of Silicon with SiCl4 and H2

✍ Scribed by Frank Becker; Sigurd Buchholz; Leslaw Mleczko

Publisher: John Wiley and Sons
Year: 2001
Tongue: German
Weight: 44 KB
Volume: 73
Category: Article
ISSN: 0009-286X
DOI: 10.1002/1522-2640(200106)73:6<686::aid-cite6862222>3.0.co;2-x

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